9/13/2012	12:12:57 AM	Run finished at 12:12 AM
9/13/2012	8:14:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/13/2012	8:14:40 AM	Recipe started at 8:14 AM
9/13/2012	8:14:40 AM	Helium valve closed
9/13/2012	8:14:40 AM	H2 valve closed
9/13/2012	8:14:40 AM	BCl3 valve closed
9/13/2012	8:14:40 AM	PH3 valve closed
9/13/2012	8:14:40 AM	SiCl4 pre valve closed
9/13/2012	8:14:40 AM	SiCl4 post valve closed
9/13/2012	8:14:40 AM	Main Vac valve closed
9/13/2012	8:14:40 AM	Bypass valve closed
9/13/2012	8:14:40 AM	Bubbler valve closed
9/13/2012	8:14:40 AM	Helium MFC set to  0.000000
9/13/2012	8:14:40 AM	H2 MFC set to  0.000000
9/13/2012	8:14:40 AM	BCl3 MFC set to  0.000000
9/13/2012	8:14:40 AM	PH3 MFC set to  0.000000
9/13/2012	8:14:40 AM	SiCl4 MFC set to  0.000000
9/13/2012	8:14:40 AM	Bypass solenoid MFC set to  0.000000
9/13/2012	8:14:40 AM	Tube furnace set to 0
9/13/2012	8:14:43 AM	H2 valve closed
9/13/2012	8:14:43 AM	BCl3 valve closed
9/13/2012	8:14:43 AM	PH3 valve closed
9/13/2012	8:14:43 AM	SiCl4 pre valve closed
9/13/2012	8:14:43 AM	SiCl4 post valve closed
9/13/2012	8:14:43 AM	Main Vac valve closed
9/13/2012	8:14:43 AM	Bypass valve closed
9/13/2012	8:14:43 AM	Bubbler valve closed
9/13/2012	8:14:43 AM	Helium valve opened
9/13/2012	8:14:43 AM	Helium MFC set to  500.000000
9/13/2012	8:14:43 AM	H2 MFC set to  0.000000
9/13/2012	8:14:43 AM	BCl3 MFC set to  0.000000
9/13/2012	8:14:43 AM	PH3 MFC set to  0.000000
9/13/2012	8:14:43 AM	SiCl4 MFC set to  0.000000
9/13/2012	8:14:43 AM	Bypass solenoid MFC set to  0.000000
9/13/2012	8:14:43 AM	Tube furnace set to 0
9/13/2012	8:15:56 AM	Helium valve closed
9/13/2012	8:15:56 AM	H2 valve closed
9/13/2012	8:15:56 AM	BCl3 valve closed
9/13/2012	8:15:56 AM	PH3 valve closed
9/13/2012	8:15:56 AM	SiCl4 pre valve closed
9/13/2012	8:15:56 AM	SiCl4 post valve closed
9/13/2012	8:15:56 AM	Main Vac valve closed
9/13/2012	8:15:56 AM	Bypass valve closed
9/13/2012	8:15:56 AM	Bubbler valve closed
9/13/2012	8:15:56 AM	Helium MFC set to  0.000000
9/13/2012	8:15:56 AM	H2 MFC set to  0.000000
9/13/2012	8:15:56 AM	BCl3 MFC set to  0.000000
9/13/2012	8:15:56 AM	PH3 MFC set to  0.000000
9/13/2012	8:15:56 AM	SiCl4 MFC set to  0.000000
9/13/2012	8:15:56 AM	Bypass solenoid MFC set to  0.000000
9/13/2012	8:15:56 AM	Tube furnace set to 0
9/13/2012	8:15:57 AM	Run finished at 8:15 AM
9/13/2012	8:15:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/13/2012	8:17:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/13/2012	8:17:33 AM	Recipe started at 8:17 AM
9/13/2012	8:17:33 AM	Helium valve closed
9/13/2012	8:17:33 AM	H2 valve closed
9/13/2012	8:17:33 AM	BCl3 valve closed
9/13/2012	8:17:33 AM	PH3 valve closed
9/13/2012	8:17:33 AM	SiCl4 pre valve closed
9/13/2012	8:17:33 AM	SiCl4 post valve closed
9/13/2012	8:17:33 AM	Main Vac valve closed
9/13/2012	8:17:33 AM	Bubbler valve closed
9/13/2012	8:17:33 AM	Bypass valve opened
9/13/2012	8:17:33 AM	Helium MFC set to  0.000000
9/13/2012	8:17:33 AM	H2 MFC set to  0.000000
9/13/2012	8:17:33 AM	BCl3 MFC set to  0.000000
9/13/2012	8:17:33 AM	PH3 MFC set to  0.000000
9/13/2012	8:17:33 AM	SiCl4 MFC set to  0.000000
9/13/2012	8:17:33 AM	Bypass solenoid MFC set to  0.000000
9/13/2012	8:17:33 AM	Tube furnace set to 0
9/13/2012	8:18:49 AM	Helium valve closed
9/13/2012	8:18:49 AM	H2 valve closed
9/13/2012	8:18:49 AM	BCl3 valve closed
9/13/2012	8:18:49 AM	PH3 valve closed
9/13/2012	8:18:49 AM	SiCl4 pre valve closed
9/13/2012	8:18:49 AM	SiCl4 post valve closed
9/13/2012	8:18:49 AM	Main Vac valve closed
9/13/2012	8:18:49 AM	Bubbler valve closed
9/13/2012	8:18:49 AM	Bypass valve opened
9/13/2012	8:18:49 AM	Helium MFC set to  0.000000
9/13/2012	8:18:49 AM	H2 MFC set to  0.000000
9/13/2012	8:18:49 AM	BCl3 MFC set to  0.000000
9/13/2012	8:18:49 AM	PH3 MFC set to  0.000000
9/13/2012	8:18:49 AM	SiCl4 MFC set to  0.000000
9/13/2012	8:18:49 AM	Bypass solenoid MFC set to  0.000000
9/13/2012	8:18:49 AM	Tube furnace set to 0
9/13/2012	8:19:49 AM	Helium valve closed
9/13/2012	8:19:49 AM	H2 valve closed
9/13/2012	8:19:49 AM	BCl3 valve closed
9/13/2012	8:19:49 AM	PH3 valve closed
9/13/2012	8:19:49 AM	SiCl4 pre valve closed
9/13/2012	8:19:49 AM	SiCl4 post valve closed
9/13/2012	8:19:49 AM	Bypass valve closed
9/13/2012	8:19:49 AM	Bubbler valve closed
9/13/2012	8:19:49 AM	Main Vac valve opened
9/13/2012	8:19:49 AM	Helium MFC set to  0.000000
9/13/2012	8:19:49 AM	H2 MFC set to  0.000000
9/13/2012	8:19:49 AM	BCl3 MFC set to  0.000000
9/13/2012	8:19:49 AM	PH3 MFC set to  0.000000
9/13/2012	8:19:49 AM	SiCl4 MFC set to  0.000000
9/13/2012	8:19:49 AM	Bypass solenoid MFC set to  0.000000
9/13/2012	8:19:49 AM	Tube furnace set to 0
9/13/2012	8:19:50 AM	Run finished at 8:19 AM
9/13/2012	8:19:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/13/2012	2:03:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/13/2012	2:03:25 PM	Recipe started at 2:03 PM
9/13/2012	2:03:25 PM	Helium valve closed
9/13/2012	2:03:25 PM	H2 valve closed
9/13/2012	2:03:25 PM	BCl3 valve closed
9/13/2012	2:03:25 PM	PH3 valve closed
9/13/2012	2:03:25 PM	SiCl4 pre valve closed
9/13/2012	2:03:25 PM	SiCl4 post valve closed
9/13/2012	2:03:25 PM	Main Vac valve closed
9/13/2012	2:03:25 PM	Bypass valve closed
9/13/2012	2:03:25 PM	Bubbler valve closed
9/13/2012	2:03:25 PM	Helium MFC set to  0.000000
9/13/2012	2:03:25 PM	H2 MFC set to  0.000000
9/13/2012	2:03:25 PM	BCl3 MFC set to  0.000000
9/13/2012	2:03:25 PM	PH3 MFC set to  0.000000
9/13/2012	2:03:25 PM	SiCl4 MFC set to  0.000000
9/13/2012	2:03:25 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	2:03:26 PM	Tube furnace set to 0
9/13/2012	2:03:29 PM	H2 valve closed
9/13/2012	2:03:29 PM	BCl3 valve closed
9/13/2012	2:03:29 PM	PH3 valve closed
9/13/2012	2:03:29 PM	SiCl4 pre valve closed
9/13/2012	2:03:29 PM	SiCl4 post valve closed
9/13/2012	2:03:29 PM	Main Vac valve closed
9/13/2012	2:03:29 PM	Bypass valve closed
9/13/2012	2:03:29 PM	Bubbler valve closed
9/13/2012	2:03:29 PM	Helium valve opened
9/13/2012	2:03:29 PM	Helium MFC set to  500.000000
9/13/2012	2:03:29 PM	H2 MFC set to  0.000000
9/13/2012	2:03:29 PM	BCl3 MFC set to  0.000000
9/13/2012	2:03:29 PM	PH3 MFC set to  0.000000
9/13/2012	2:03:29 PM	SiCl4 MFC set to  0.000000
9/13/2012	2:03:29 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	2:03:29 PM	Tube furnace set to 0
9/13/2012	2:04:41 PM	Helium valve closed
9/13/2012	2:04:41 PM	H2 valve closed
9/13/2012	2:04:41 PM	BCl3 valve closed
9/13/2012	2:04:41 PM	PH3 valve closed
9/13/2012	2:04:41 PM	SiCl4 pre valve closed
9/13/2012	2:04:41 PM	SiCl4 post valve closed
9/13/2012	2:04:41 PM	Main Vac valve closed
9/13/2012	2:04:41 PM	Bypass valve closed
9/13/2012	2:04:41 PM	Bubbler valve closed
9/13/2012	2:04:41 PM	Helium MFC set to  0.000000
9/13/2012	2:04:41 PM	H2 MFC set to  0.000000
9/13/2012	2:04:41 PM	BCl3 MFC set to  0.000000
9/13/2012	2:04:41 PM	PH3 MFC set to  0.000000
9/13/2012	2:04:41 PM	SiCl4 MFC set to  0.000000
9/13/2012	2:04:41 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	2:04:41 PM	Tube furnace set to 0
9/13/2012	2:04:42 PM	Run finished at 2:04 PM
9/13/2012	2:04:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/13/2012	2:58:34 PM	Helium valve closed
9/13/2012	2:58:34 PM	H2 valve closed
9/13/2012	2:58:34 PM	BCl3 valve closed
9/13/2012	2:58:34 PM	PH3 valve closed
9/13/2012	2:58:34 PM	SiCl4 pre valve closed
9/13/2012	2:58:34 PM	SiCl4 post valve closed
9/13/2012	2:58:34 PM	Main Vac valve closed
9/13/2012	2:58:34 PM	Bypass valve closed
9/13/2012	2:58:34 PM	Bubbler valve closed
9/13/2012	2:58:34 PM	Helium MFC set to  0.000000
9/13/2012	2:58:34 PM	H2 MFC set to  0.000000
9/13/2012	2:58:34 PM	BCl3 MFC set to  0.000000
9/13/2012	2:58:34 PM	PH3 MFC set to  0.000000
9/13/2012	2:58:34 PM	SiCl4 MFC set to  0.000000
9/13/2012	2:58:34 PM	Bypass solenoid MFC set to  760.000000
9/13/2012	2:58:35 PM	Tube furnace set to 0
9/13/2012	3:15:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/13/2012	3:15:56 PM	Recipe started at 3:15 PM
9/13/2012	3:15:56 PM	Helium valve closed
9/13/2012	3:15:56 PM	H2 valve closed
9/13/2012	3:15:56 PM	BCl3 valve closed
9/13/2012	3:15:56 PM	PH3 valve closed
9/13/2012	3:15:56 PM	SiCl4 pre valve closed
9/13/2012	3:15:56 PM	SiCl4 post valve closed
9/13/2012	3:15:56 PM	Main Vac valve closed
9/13/2012	3:15:56 PM	Bubbler valve closed
9/13/2012	3:15:56 PM	Bypass valve opened
9/13/2012	3:15:56 PM	Helium MFC set to  0.000000
9/13/2012	3:15:56 PM	H2 MFC set to  0.000000
9/13/2012	3:15:56 PM	BCl3 MFC set to  0.000000
9/13/2012	3:15:56 PM	PH3 MFC set to  0.000000
9/13/2012	3:15:56 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:15:56 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:15:56 PM	Tube furnace set to 0
9/13/2012	3:17:36 PM	Helium valve closed
9/13/2012	3:17:36 PM	H2 valve closed
9/13/2012	3:17:36 PM	BCl3 valve closed
9/13/2012	3:17:36 PM	PH3 valve closed
9/13/2012	3:17:36 PM	SiCl4 pre valve closed
9/13/2012	3:17:36 PM	SiCl4 post valve closed
9/13/2012	3:17:36 PM	Main Vac valve closed
9/13/2012	3:17:36 PM	Bubbler valve closed
9/13/2012	3:17:36 PM	Bypass valve opened
9/13/2012	3:17:36 PM	Helium MFC set to  0.000000
9/13/2012	3:17:36 PM	H2 MFC set to  0.000000
9/13/2012	3:17:36 PM	BCl3 MFC set to  0.000000
9/13/2012	3:17:36 PM	PH3 MFC set to  0.000000
9/13/2012	3:17:36 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:17:36 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:17:36 PM	Tube furnace set to 0
9/13/2012	3:18:36 PM	Helium valve closed
9/13/2012	3:18:36 PM	H2 valve closed
9/13/2012	3:18:36 PM	BCl3 valve closed
9/13/2012	3:18:36 PM	PH3 valve closed
9/13/2012	3:18:36 PM	SiCl4 pre valve closed
9/13/2012	3:18:36 PM	SiCl4 post valve closed
9/13/2012	3:18:36 PM	Bypass valve closed
9/13/2012	3:18:36 PM	Bubbler valve closed
9/13/2012	3:18:36 PM	Main Vac valve opened
9/13/2012	3:18:36 PM	Helium MFC set to  0.000000
9/13/2012	3:18:36 PM	H2 MFC set to  0.000000
9/13/2012	3:18:36 PM	BCl3 MFC set to  0.000000
9/13/2012	3:18:36 PM	PH3 MFC set to  0.000000
9/13/2012	3:18:36 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:18:36 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:18:37 PM	Tube furnace set to 0
9/13/2012	3:18:38 PM	Run finished at 3:18 PM
9/13/2012	3:18:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/13/2012	3:19:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/13/2012	3:19:46 PM	Recipe started at 3:19 PM
9/13/2012	3:19:46 PM	Helium valve closed
9/13/2012	3:19:46 PM	H2 valve closed
9/13/2012	3:19:46 PM	BCl3 valve closed
9/13/2012	3:19:46 PM	PH3 valve closed
9/13/2012	3:19:46 PM	SiCl4 pre valve closed
9/13/2012	3:19:46 PM	SiCl4 post valve closed
9/13/2012	3:19:46 PM	Main Vac valve closed
9/13/2012	3:19:46 PM	Bypass valve closed
9/13/2012	3:19:46 PM	Bubbler valve closed
9/13/2012	3:19:46 PM	Helium MFC set to  0.000000
9/13/2012	3:19:46 PM	H2 MFC set to  0.000000
9/13/2012	3:19:46 PM	BCl3 MFC set to  0.000000
9/13/2012	3:19:46 PM	PH3 MFC set to  0.000000
9/13/2012	3:19:47 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:19:47 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:19:47 PM	Tube furnace set to 0
9/13/2012	3:19:50 PM	H2 valve closed
9/13/2012	3:19:50 PM	BCl3 valve closed
9/13/2012	3:19:50 PM	PH3 valve closed
9/13/2012	3:19:50 PM	SiCl4 pre valve closed
9/13/2012	3:19:50 PM	SiCl4 post valve closed
9/13/2012	3:19:50 PM	Main Vac valve closed
9/13/2012	3:19:50 PM	Bypass valve closed
9/13/2012	3:19:50 PM	Bubbler valve closed
9/13/2012	3:19:50 PM	Helium valve opened
9/13/2012	3:19:50 PM	Helium MFC set to  500.000000
9/13/2012	3:19:50 PM	H2 MFC set to  0.000000
9/13/2012	3:19:50 PM	BCl3 MFC set to  0.000000
9/13/2012	3:19:50 PM	PH3 MFC set to  0.000000
9/13/2012	3:19:50 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:19:50 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:19:50 PM	Tube furnace set to 0
9/13/2012	3:21:03 PM	Helium valve closed
9/13/2012	3:21:03 PM	H2 valve closed
9/13/2012	3:21:03 PM	BCl3 valve closed
9/13/2012	3:21:03 PM	PH3 valve closed
9/13/2012	3:21:03 PM	SiCl4 pre valve closed
9/13/2012	3:21:03 PM	SiCl4 post valve closed
9/13/2012	3:21:03 PM	Main Vac valve closed
9/13/2012	3:21:03 PM	Bypass valve closed
9/13/2012	3:21:03 PM	Bubbler valve closed
9/13/2012	3:21:03 PM	Helium MFC set to  0.000000
9/13/2012	3:21:03 PM	H2 MFC set to  0.000000
9/13/2012	3:21:03 PM	BCl3 MFC set to  0.000000
9/13/2012	3:21:03 PM	PH3 MFC set to  0.000000
9/13/2012	3:21:03 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:21:03 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:21:04 PM	Tube furnace set to 0
9/13/2012	3:21:05 PM	Run finished at 3:21 PM
9/13/2012	3:21:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/13/2012	3:25:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/13/2012	3:25:11 PM	Recipe started at 3:25 PM
9/13/2012	3:25:11 PM	Helium valve closed
9/13/2012	3:25:11 PM	H2 valve closed
9/13/2012	3:25:11 PM	BCl3 valve closed
9/13/2012	3:25:11 PM	PH3 valve closed
9/13/2012	3:25:11 PM	SiCl4 pre valve closed
9/13/2012	3:25:11 PM	SiCl4 post valve closed
9/13/2012	3:25:11 PM	Main Vac valve closed
9/13/2012	3:25:11 PM	Bubbler valve closed
9/13/2012	3:25:11 PM	Bypass valve opened
9/13/2012	3:25:11 PM	Helium MFC set to  0.000000
9/13/2012	3:25:11 PM	H2 MFC set to  0.000000
9/13/2012	3:25:11 PM	BCl3 MFC set to  0.000000
9/13/2012	3:25:11 PM	PH3 MFC set to  0.000000
9/13/2012	3:25:11 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:25:11 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:25:11 PM	Tube furnace set to 0
9/13/2012	3:26:31 PM	Helium valve closed
9/13/2012	3:26:31 PM	H2 valve closed
9/13/2012	3:26:31 PM	BCl3 valve closed
9/13/2012	3:26:31 PM	PH3 valve closed
9/13/2012	3:26:31 PM	SiCl4 pre valve closed
9/13/2012	3:26:31 PM	SiCl4 post valve closed
9/13/2012	3:26:31 PM	Main Vac valve closed
9/13/2012	3:26:31 PM	Bubbler valve closed
9/13/2012	3:26:31 PM	Bypass valve opened
9/13/2012	3:26:31 PM	Helium MFC set to  0.000000
9/13/2012	3:26:31 PM	H2 MFC set to  0.000000
9/13/2012	3:26:31 PM	BCl3 MFC set to  0.000000
9/13/2012	3:26:31 PM	PH3 MFC set to  0.000000
9/13/2012	3:26:31 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:26:31 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:26:31 PM	Tube furnace set to 0
9/13/2012	3:27:12 PM	Helium valve closed
9/13/2012	3:27:12 PM	H2 valve closed
9/13/2012	3:27:12 PM	BCl3 valve closed
9/13/2012	3:27:12 PM	PH3 valve closed
9/13/2012	3:27:12 PM	SiCl4 pre valve closed
9/13/2012	3:27:12 PM	SiCl4 post valve closed
9/13/2012	3:27:12 PM	Bypass valve closed
9/13/2012	3:27:12 PM	Bubbler valve closed
9/13/2012	3:27:12 PM	Main Vac valve opened
9/13/2012	3:27:12 PM	Helium MFC set to  0.000000
9/13/2012	3:27:12 PM	H2 MFC set to  0.000000
9/13/2012	3:27:12 PM	BCl3 MFC set to  0.000000
9/13/2012	3:27:12 PM	PH3 MFC set to  0.000000
9/13/2012	3:27:12 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:27:12 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:27:12 PM	Tube furnace set to 0
9/13/2012	3:27:13 PM	Run finished at 3:27 PM
9/13/2012	3:27:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/13/2012	3:49:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/13/2012	3:49:29 PM	Recipe started at 3:49 PM
9/13/2012	3:49:29 PM	Helium valve closed
9/13/2012	3:49:29 PM	H2 valve closed
9/13/2012	3:49:29 PM	BCl3 valve closed
9/13/2012	3:49:29 PM	PH3 valve closed
9/13/2012	3:49:29 PM	SiCl4 pre valve closed
9/13/2012	3:49:29 PM	SiCl4 post valve closed
9/13/2012	3:49:29 PM	Main Vac valve closed
9/13/2012	3:49:29 PM	Bubbler valve closed
9/13/2012	3:49:29 PM	Bypass valve opened
9/13/2012	3:49:29 PM	Helium MFC set to  0.000000
9/13/2012	3:49:29 PM	H2 MFC set to  0.000000
9/13/2012	3:49:29 PM	BCl3 MFC set to  0.000000
9/13/2012	3:49:29 PM	PH3 MFC set to  0.000000
9/13/2012	3:49:29 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:49:29 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:49:30 PM	Tube furnace set to 0
9/13/2012	3:49:30 PM	Helium valve closed
9/13/2012	3:49:30 PM	H2 valve closed
9/13/2012	3:49:30 PM	BCl3 valve closed
9/13/2012	3:49:30 PM	PH3 valve closed
9/13/2012	3:49:30 PM	SiCl4 pre valve closed
9/13/2012	3:49:30 PM	SiCl4 post valve closed
9/13/2012	3:49:30 PM	Main Vac valve closed
9/13/2012	3:49:30 PM	Bubbler valve closed
9/13/2012	3:49:30 PM	Bypass valve opened
9/13/2012	3:49:30 PM	Helium MFC set to  0.000000
9/13/2012	3:49:30 PM	H2 MFC set to  0.000000
9/13/2012	3:49:30 PM	BCl3 MFC set to  0.000000
9/13/2012	3:49:30 PM	PH3 MFC set to  0.000000
9/13/2012	3:49:30 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:49:30 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:49:30 PM	Tube furnace set to 0
9/13/2012	3:49:31 PM	Helium valve closed
9/13/2012	3:49:31 PM	H2 valve closed
9/13/2012	3:49:31 PM	BCl3 valve closed
9/13/2012	3:49:31 PM	PH3 valve closed
9/13/2012	3:49:31 PM	SiCl4 pre valve closed
9/13/2012	3:49:31 PM	SiCl4 post valve closed
9/13/2012	3:49:31 PM	Bypass valve closed
9/13/2012	3:49:31 PM	Bubbler valve closed
9/13/2012	3:49:31 PM	Main Vac valve opened
9/13/2012	3:49:31 PM	Helium MFC set to  0.000000
9/13/2012	3:49:31 PM	H2 MFC set to  0.000000
9/13/2012	3:49:31 PM	BCl3 MFC set to  0.000000
9/13/2012	3:49:31 PM	PH3 MFC set to  0.000000
9/13/2012	3:49:31 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:49:31 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:49:31 PM	Tube furnace set to 0
9/13/2012	3:49:32 PM	H2 valve closed
9/13/2012	3:49:32 PM	BCl3 valve closed
9/13/2012	3:49:32 PM	PH3 valve closed
9/13/2012	3:49:32 PM	SiCl4 pre valve closed
9/13/2012	3:49:32 PM	SiCl4 post valve closed
9/13/2012	3:49:32 PM	Bypass valve closed
9/13/2012	3:49:32 PM	Bubbler valve closed
9/13/2012	3:49:32 PM	Helium valve opened
9/13/2012	3:49:32 PM	Main Vac valve opened
9/13/2012	3:49:32 PM	Helium MFC set to  20.000000
9/13/2012	3:49:32 PM	H2 MFC set to  0.000000
9/13/2012	3:49:32 PM	BCl3 MFC set to  0.000000
9/13/2012	3:49:32 PM	PH3 MFC set to  0.000000
9/13/2012	3:49:32 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:49:32 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:49:32 PM	Tube furnace set to 0
9/13/2012	3:50:02 PM	Helium valve closed
9/13/2012	3:50:02 PM	H2 valve closed
9/13/2012	3:50:02 PM	BCl3 valve closed
9/13/2012	3:50:02 PM	PH3 valve closed
9/13/2012	3:50:02 PM	SiCl4 pre valve closed
9/13/2012	3:50:02 PM	SiCl4 post valve closed
9/13/2012	3:50:02 PM	Bypass valve closed
9/13/2012	3:50:02 PM	Bubbler valve closed
9/13/2012	3:50:02 PM	Main Vac valve opened
9/13/2012	3:50:02 PM	Helium MFC set to  0.000000
9/13/2012	3:50:02 PM	H2 MFC set to  0.000000
9/13/2012	3:50:02 PM	BCl3 MFC set to  0.000000
9/13/2012	3:50:02 PM	PH3 MFC set to  0.000000
9/13/2012	3:50:02 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:50:02 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:50:02 PM	Tube furnace set to 0
9/13/2012	3:50:32 PM	H2 valve closed
9/13/2012	3:50:32 PM	BCl3 valve closed
9/13/2012	3:50:32 PM	PH3 valve closed
9/13/2012	3:50:32 PM	SiCl4 pre valve closed
9/13/2012	3:50:32 PM	SiCl4 post valve closed
9/13/2012	3:50:32 PM	Bypass valve closed
9/13/2012	3:50:32 PM	Bubbler valve closed
9/13/2012	3:50:32 PM	Helium valve opened
9/13/2012	3:50:32 PM	Main Vac valve opened
9/13/2012	3:50:32 PM	Helium MFC set to  20.000000
9/13/2012	3:50:32 PM	H2 MFC set to  0.000000
9/13/2012	3:50:32 PM	BCl3 MFC set to  0.000000
9/13/2012	3:50:32 PM	PH3 MFC set to  0.000000
9/13/2012	3:50:32 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:50:32 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:50:32 PM	Tube furnace set to 0
9/13/2012	3:51:02 PM	Helium valve closed
9/13/2012	3:51:02 PM	H2 valve closed
9/13/2012	3:51:02 PM	BCl3 valve closed
9/13/2012	3:51:03 PM	PH3 valve closed
9/13/2012	3:51:03 PM	SiCl4 pre valve closed
9/13/2012	3:51:03 PM	SiCl4 post valve closed
9/13/2012	3:51:03 PM	Bypass valve closed
9/13/2012	3:51:03 PM	Bubbler valve closed
9/13/2012	3:51:03 PM	Main Vac valve opened
9/13/2012	3:51:03 PM	Helium MFC set to  0.000000
9/13/2012	3:51:03 PM	H2 MFC set to  0.000000
9/13/2012	3:51:03 PM	BCl3 MFC set to  0.000000
9/13/2012	3:51:03 PM	PH3 MFC set to  0.000000
9/13/2012	3:51:03 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:51:03 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:51:03 PM	Tube furnace set to 0
9/13/2012	3:51:33 PM	H2 valve closed
9/13/2012	3:51:33 PM	BCl3 valve closed
9/13/2012	3:51:33 PM	PH3 valve closed
9/13/2012	3:51:33 PM	SiCl4 pre valve closed
9/13/2012	3:51:33 PM	SiCl4 post valve closed
9/13/2012	3:51:33 PM	Bypass valve closed
9/13/2012	3:51:33 PM	Bubbler valve closed
9/13/2012	3:51:33 PM	Helium valve opened
9/13/2012	3:51:33 PM	Main Vac valve opened
9/13/2012	3:51:33 PM	Helium MFC set to  20.000000
9/13/2012	3:51:33 PM	H2 MFC set to  0.000000
9/13/2012	3:51:33 PM	BCl3 MFC set to  0.000000
9/13/2012	3:51:33 PM	PH3 MFC set to  0.000000
9/13/2012	3:51:33 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:51:33 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:51:33 PM	Tube furnace set to 0
9/13/2012	3:52:03 PM	Helium valve closed
9/13/2012	3:52:03 PM	H2 valve closed
9/13/2012	3:52:03 PM	BCl3 valve closed
9/13/2012	3:52:03 PM	PH3 valve closed
9/13/2012	3:52:03 PM	SiCl4 pre valve closed
9/13/2012	3:52:03 PM	SiCl4 post valve closed
9/13/2012	3:52:03 PM	Bypass valve closed
9/13/2012	3:52:03 PM	Bubbler valve closed
9/13/2012	3:52:03 PM	Main Vac valve opened
9/13/2012	3:52:03 PM	Helium MFC set to  0.000000
9/13/2012	3:52:03 PM	H2 MFC set to  0.000000
9/13/2012	3:52:03 PM	BCl3 MFC set to  0.000000
9/13/2012	3:52:03 PM	PH3 MFC set to  0.000000
9/13/2012	3:52:03 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:52:03 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:52:03 PM	Tube furnace set to 0
9/13/2012	3:52:33 PM	H2 valve closed
9/13/2012	3:52:33 PM	BCl3 valve closed
9/13/2012	3:52:33 PM	PH3 valve closed
9/13/2012	3:52:33 PM	SiCl4 pre valve closed
9/13/2012	3:52:33 PM	SiCl4 post valve closed
9/13/2012	3:52:33 PM	Bypass valve closed
9/13/2012	3:52:33 PM	Bubbler valve closed
9/13/2012	3:52:33 PM	Helium valve opened
9/13/2012	3:52:33 PM	Main Vac valve opened
9/13/2012	3:52:33 PM	Helium MFC set to  20.000000
9/13/2012	3:52:33 PM	H2 MFC set to  0.000000
9/13/2012	3:52:33 PM	BCl3 MFC set to  0.000000
9/13/2012	3:52:33 PM	PH3 MFC set to  0.000000
9/13/2012	3:52:33 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:52:33 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:52:33 PM	Tube furnace set to 0
9/13/2012	3:53:03 PM	Helium valve closed
9/13/2012	3:53:03 PM	H2 valve closed
9/13/2012	3:53:03 PM	BCl3 valve closed
9/13/2012	3:53:03 PM	PH3 valve closed
9/13/2012	3:53:03 PM	SiCl4 pre valve closed
9/13/2012	3:53:03 PM	SiCl4 post valve closed
9/13/2012	3:53:03 PM	Bypass valve closed
9/13/2012	3:53:03 PM	Bubbler valve closed
9/13/2012	3:53:03 PM	Main Vac valve opened
9/13/2012	3:53:03 PM	Helium MFC set to  0.000000
9/13/2012	3:53:03 PM	H2 MFC set to  0.000000
9/13/2012	3:53:03 PM	BCl3 MFC set to  0.000000
9/13/2012	3:53:03 PM	PH3 MFC set to  0.000000
9/13/2012	3:53:03 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:53:03 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:53:04 PM	Tube furnace set to 0
9/13/2012	3:53:34 PM	H2 valve closed
9/13/2012	3:53:34 PM	BCl3 valve closed
9/13/2012	3:53:34 PM	PH3 valve closed
9/13/2012	3:53:34 PM	SiCl4 pre valve closed
9/13/2012	3:53:34 PM	SiCl4 post valve closed
9/13/2012	3:53:34 PM	Bypass valve closed
9/13/2012	3:53:34 PM	Bubbler valve closed
9/13/2012	3:53:34 PM	Helium valve opened
9/13/2012	3:53:34 PM	Main Vac valve opened
9/13/2012	3:53:34 PM	Helium MFC set to  20.000000
9/13/2012	3:53:34 PM	H2 MFC set to  0.000000
9/13/2012	3:53:34 PM	BCl3 MFC set to  0.000000
9/13/2012	3:53:34 PM	PH3 MFC set to  0.000000
9/13/2012	3:53:34 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:53:34 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:53:34 PM	Tube furnace set to 0
9/13/2012	3:54:04 PM	Helium valve closed
9/13/2012	3:54:04 PM	H2 valve closed
9/13/2012	3:54:04 PM	BCl3 valve closed
9/13/2012	3:54:04 PM	PH3 valve closed
9/13/2012	3:54:04 PM	SiCl4 pre valve closed
9/13/2012	3:54:04 PM	SiCl4 post valve closed
9/13/2012	3:54:04 PM	Bypass valve closed
9/13/2012	3:54:04 PM	Bubbler valve closed
9/13/2012	3:54:04 PM	Main Vac valve opened
9/13/2012	3:54:04 PM	Helium MFC set to  0.000000
9/13/2012	3:54:04 PM	H2 MFC set to  0.000000
9/13/2012	3:54:04 PM	BCl3 MFC set to  0.000000
9/13/2012	3:54:04 PM	PH3 MFC set to  0.000000
9/13/2012	3:54:04 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:54:04 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:54:04 PM	Tube furnace set to 0
9/13/2012	3:54:34 PM	H2 valve closed
9/13/2012	3:54:34 PM	BCl3 valve closed
9/13/2012	3:54:34 PM	PH3 valve closed
9/13/2012	3:54:34 PM	SiCl4 pre valve closed
9/13/2012	3:54:34 PM	SiCl4 post valve closed
9/13/2012	3:54:34 PM	Bypass valve closed
9/13/2012	3:54:34 PM	Bubbler valve closed
9/13/2012	3:54:34 PM	Helium valve opened
9/13/2012	3:54:34 PM	Main Vac valve opened
9/13/2012	3:54:34 PM	Helium MFC set to  20.000000
9/13/2012	3:54:34 PM	H2 MFC set to  0.000000
9/13/2012	3:54:34 PM	BCl3 MFC set to  0.000000
9/13/2012	3:54:34 PM	PH3 MFC set to  0.000000
9/13/2012	3:54:34 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:54:34 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:54:34 PM	Tube furnace set to 0
9/13/2012	3:55:04 PM	Helium valve closed
9/13/2012	3:55:04 PM	H2 valve closed
9/13/2012	3:55:04 PM	BCl3 valve closed
9/13/2012	3:55:04 PM	PH3 valve closed
9/13/2012	3:55:04 PM	SiCl4 pre valve closed
9/13/2012	3:55:04 PM	SiCl4 post valve closed
9/13/2012	3:55:04 PM	Bypass valve closed
9/13/2012	3:55:04 PM	Bubbler valve closed
9/13/2012	3:55:04 PM	Main Vac valve opened
9/13/2012	3:55:04 PM	Helium MFC set to  0.000000
9/13/2012	3:55:04 PM	H2 MFC set to  0.000000
9/13/2012	3:55:04 PM	BCl3 MFC set to  0.000000
9/13/2012	3:55:04 PM	PH3 MFC set to  0.000000
9/13/2012	3:55:04 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:55:04 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:55:05 PM	Tube furnace set to 0
9/13/2012	3:55:35 PM	H2 valve closed
9/13/2012	3:55:35 PM	BCl3 valve closed
9/13/2012	3:55:35 PM	PH3 valve closed
9/13/2012	3:55:35 PM	SiCl4 pre valve closed
9/13/2012	3:55:35 PM	SiCl4 post valve closed
9/13/2012	3:55:35 PM	Bypass valve closed
9/13/2012	3:55:35 PM	Bubbler valve closed
9/13/2012	3:55:35 PM	Helium valve opened
9/13/2012	3:55:35 PM	Main Vac valve opened
9/13/2012	3:55:35 PM	Helium MFC set to  20.000000
9/13/2012	3:55:35 PM	H2 MFC set to  0.000000
9/13/2012	3:55:35 PM	BCl3 MFC set to  0.000000
9/13/2012	3:55:35 PM	PH3 MFC set to  0.000000
9/13/2012	3:55:35 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:55:35 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:55:35 PM	Tube furnace set to 0
9/13/2012	3:56:05 PM	Helium valve closed
9/13/2012	3:56:05 PM	H2 valve closed
9/13/2012	3:56:05 PM	BCl3 valve closed
9/13/2012	3:56:05 PM	PH3 valve closed
9/13/2012	3:56:05 PM	SiCl4 pre valve closed
9/13/2012	3:56:05 PM	SiCl4 post valve closed
9/13/2012	3:56:05 PM	Bypass valve closed
9/13/2012	3:56:05 PM	Bubbler valve closed
9/13/2012	3:56:05 PM	Main Vac valve opened
9/13/2012	3:56:05 PM	Helium MFC set to  0.000000
9/13/2012	3:56:05 PM	H2 MFC set to  0.000000
9/13/2012	3:56:05 PM	BCl3 MFC set to  0.000000
9/13/2012	3:56:05 PM	PH3 MFC set to  0.000000
9/13/2012	3:56:05 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:56:05 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:56:05 PM	Tube furnace set to 0
9/13/2012	3:56:35 PM	H2 valve closed
9/13/2012	3:56:35 PM	BCl3 valve closed
9/13/2012	3:56:35 PM	PH3 valve closed
9/13/2012	3:56:35 PM	SiCl4 pre valve closed
9/13/2012	3:56:35 PM	SiCl4 post valve closed
9/13/2012	3:56:35 PM	Bypass valve closed
9/13/2012	3:56:35 PM	Bubbler valve closed
9/13/2012	3:56:35 PM	Helium valve opened
9/13/2012	3:56:35 PM	Main Vac valve opened
9/13/2012	3:56:35 PM	Helium MFC set to  20.000000
9/13/2012	3:56:35 PM	H2 MFC set to  0.000000
9/13/2012	3:56:35 PM	BCl3 MFC set to  0.000000
9/13/2012	3:56:35 PM	PH3 MFC set to  0.000000
9/13/2012	3:56:35 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:56:35 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:56:35 PM	Tube furnace set to 0
9/13/2012	3:57:05 PM	Helium valve closed
9/13/2012	3:57:05 PM	H2 valve closed
9/13/2012	3:57:05 PM	BCl3 valve closed
9/13/2012	3:57:05 PM	PH3 valve closed
9/13/2012	3:57:05 PM	SiCl4 pre valve closed
9/13/2012	3:57:05 PM	SiCl4 post valve closed
9/13/2012	3:57:05 PM	Bypass valve closed
9/13/2012	3:57:05 PM	Bubbler valve closed
9/13/2012	3:57:05 PM	Main Vac valve opened
9/13/2012	3:57:05 PM	Helium MFC set to  0.000000
9/13/2012	3:57:05 PM	H2 MFC set to  0.000000
9/13/2012	3:57:05 PM	BCl3 MFC set to  0.000000
9/13/2012	3:57:05 PM	PH3 MFC set to  0.000000
9/13/2012	3:57:05 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:57:05 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:57:06 PM	Tube furnace set to 0
9/13/2012	3:57:36 PM	H2 valve closed
9/13/2012	3:57:36 PM	BCl3 valve closed
9/13/2012	3:57:36 PM	PH3 valve closed
9/13/2012	3:57:36 PM	SiCl4 pre valve closed
9/13/2012	3:57:36 PM	SiCl4 post valve closed
9/13/2012	3:57:36 PM	Bypass valve closed
9/13/2012	3:57:36 PM	Bubbler valve closed
9/13/2012	3:57:36 PM	Helium valve opened
9/13/2012	3:57:36 PM	Main Vac valve opened
9/13/2012	3:57:36 PM	Helium MFC set to  20.000000
9/13/2012	3:57:36 PM	H2 MFC set to  0.000000
9/13/2012	3:57:36 PM	BCl3 MFC set to  0.000000
9/13/2012	3:57:36 PM	PH3 MFC set to  0.000000
9/13/2012	3:57:36 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:57:36 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:57:36 PM	Tube furnace set to 0
9/13/2012	3:58:06 PM	Helium valve closed
9/13/2012	3:58:06 PM	H2 valve closed
9/13/2012	3:58:06 PM	BCl3 valve closed
9/13/2012	3:58:06 PM	PH3 valve closed
9/13/2012	3:58:06 PM	SiCl4 pre valve closed
9/13/2012	3:58:06 PM	SiCl4 post valve closed
9/13/2012	3:58:06 PM	Bypass valve closed
9/13/2012	3:58:06 PM	Bubbler valve closed
9/13/2012	3:58:06 PM	Main Vac valve opened
9/13/2012	3:58:06 PM	Helium MFC set to  0.000000
9/13/2012	3:58:06 PM	H2 MFC set to  0.000000
9/13/2012	3:58:06 PM	BCl3 MFC set to  0.000000
9/13/2012	3:58:06 PM	PH3 MFC set to  0.000000
9/13/2012	3:58:06 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:58:06 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:58:06 PM	Tube furnace set to 0
9/13/2012	3:58:36 PM	H2 valve closed
9/13/2012	3:58:36 PM	BCl3 valve closed
9/13/2012	3:58:36 PM	PH3 valve closed
9/13/2012	3:58:36 PM	SiCl4 pre valve closed
9/13/2012	3:58:36 PM	SiCl4 post valve closed
9/13/2012	3:58:36 PM	Bypass valve closed
9/13/2012	3:58:36 PM	Bubbler valve closed
9/13/2012	3:58:36 PM	Helium valve opened
9/13/2012	3:58:36 PM	Main Vac valve opened
9/13/2012	3:58:36 PM	Helium MFC set to  20.000000
9/13/2012	3:58:36 PM	H2 MFC set to  0.000000
9/13/2012	3:58:36 PM	BCl3 MFC set to  0.000000
9/13/2012	3:58:36 PM	PH3 MFC set to  0.000000
9/13/2012	3:58:36 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:58:36 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:58:36 PM	Tube furnace set to 0
9/13/2012	3:59:06 PM	Helium valve closed
9/13/2012	3:59:06 PM	H2 valve closed
9/13/2012	3:59:06 PM	BCl3 valve closed
9/13/2012	3:59:06 PM	PH3 valve closed
9/13/2012	3:59:06 PM	SiCl4 pre valve closed
9/13/2012	3:59:06 PM	SiCl4 post valve closed
9/13/2012	3:59:06 PM	Bypass valve closed
9/13/2012	3:59:06 PM	Bubbler valve closed
9/13/2012	3:59:06 PM	Main Vac valve opened
9/13/2012	3:59:06 PM	Helium MFC set to  0.000000
9/13/2012	3:59:06 PM	H2 MFC set to  0.000000
9/13/2012	3:59:06 PM	BCl3 MFC set to  0.000000
9/13/2012	3:59:06 PM	PH3 MFC set to  0.000000
9/13/2012	3:59:06 PM	SiCl4 MFC set to  0.000000
9/13/2012	3:59:06 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	3:59:06 PM	Tube furnace set to 0
9/13/2012	3:59:07 PM	Run finished at 3:59 PM
9/13/2012	3:59:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/13/2012	4:04:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/13/2012	4:04:16 PM	Recipe started at 4:04 PM
9/13/2012	4:04:16 PM	Helium valve closed
9/13/2012	4:04:16 PM	H2 valve closed
9/13/2012	4:04:16 PM	BCl3 valve closed
9/13/2012	4:04:16 PM	PH3 valve closed
9/13/2012	4:04:16 PM	SiCl4 pre valve closed
9/13/2012	4:04:16 PM	SiCl4 post valve closed
9/13/2012	4:04:16 PM	Main Vac valve closed
9/13/2012	4:04:16 PM	Bubbler valve closed
9/13/2012	4:04:16 PM	Bypass valve opened
9/13/2012	4:04:16 PM	Helium MFC set to  0.000000
9/13/2012	4:04:16 PM	H2 MFC set to  0.000000
9/13/2012	4:04:16 PM	BCl3 MFC set to  0.000000
9/13/2012	4:04:16 PM	PH3 MFC set to  0.000000
9/13/2012	4:04:16 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:04:16 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:04:16 PM	Tube furnace set to 0
9/13/2012	4:04:17 PM	Helium valve closed
9/13/2012	4:04:17 PM	H2 valve closed
9/13/2012	4:04:17 PM	BCl3 valve closed
9/13/2012	4:04:17 PM	PH3 valve closed
9/13/2012	4:04:17 PM	SiCl4 pre valve closed
9/13/2012	4:04:17 PM	SiCl4 post valve closed
9/13/2012	4:04:17 PM	Main Vac valve closed
9/13/2012	4:04:17 PM	Bubbler valve closed
9/13/2012	4:04:17 PM	Bypass valve opened
9/13/2012	4:04:17 PM	Helium MFC set to  0.000000
9/13/2012	4:04:17 PM	H2 MFC set to  0.000000
9/13/2012	4:04:17 PM	BCl3 MFC set to  0.000000
9/13/2012	4:04:17 PM	PH3 MFC set to  0.000000
9/13/2012	4:04:17 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:04:17 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:04:17 PM	Tube furnace set to 0
9/13/2012	4:04:17 PM	Helium valve closed
9/13/2012	4:04:17 PM	H2 valve closed
9/13/2012	4:04:17 PM	BCl3 valve closed
9/13/2012	4:04:17 PM	PH3 valve closed
9/13/2012	4:04:17 PM	SiCl4 pre valve closed
9/13/2012	4:04:17 PM	SiCl4 post valve closed
9/13/2012	4:04:17 PM	Bypass valve closed
9/13/2012	4:04:17 PM	Bubbler valve closed
9/13/2012	4:04:17 PM	Main Vac valve opened
9/13/2012	4:04:17 PM	Helium MFC set to  0.000000
9/13/2012	4:04:17 PM	H2 MFC set to  0.000000
9/13/2012	4:04:17 PM	BCl3 MFC set to  0.000000
9/13/2012	4:04:17 PM	PH3 MFC set to  0.000000
9/13/2012	4:04:17 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:04:17 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:04:17 PM	Tube furnace set to 0
9/13/2012	4:04:18 PM	H2 valve closed
9/13/2012	4:04:18 PM	BCl3 valve closed
9/13/2012	4:04:18 PM	PH3 valve closed
9/13/2012	4:04:18 PM	SiCl4 pre valve closed
9/13/2012	4:04:18 PM	SiCl4 post valve closed
9/13/2012	4:04:18 PM	Bypass valve closed
9/13/2012	4:04:18 PM	Bubbler valve closed
9/13/2012	4:04:18 PM	Helium valve opened
9/13/2012	4:04:18 PM	Main Vac valve opened
9/13/2012	4:04:18 PM	Helium MFC set to  20.000000
9/13/2012	4:04:18 PM	H2 MFC set to  0.000000
9/13/2012	4:04:18 PM	BCl3 MFC set to  0.000000
9/13/2012	4:04:18 PM	PH3 MFC set to  0.000000
9/13/2012	4:04:18 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:04:18 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:04:18 PM	Tube furnace set to 0
9/13/2012	4:04:48 PM	Helium valve closed
9/13/2012	4:04:48 PM	H2 valve closed
9/13/2012	4:04:48 PM	BCl3 valve closed
9/13/2012	4:04:48 PM	PH3 valve closed
9/13/2012	4:04:48 PM	SiCl4 pre valve closed
9/13/2012	4:04:48 PM	SiCl4 post valve closed
9/13/2012	4:04:48 PM	Bypass valve closed
9/13/2012	4:04:48 PM	Bubbler valve closed
9/13/2012	4:04:48 PM	Main Vac valve opened
9/13/2012	4:04:48 PM	Helium MFC set to  0.000000
9/13/2012	4:04:48 PM	H2 MFC set to  0.000000
9/13/2012	4:04:48 PM	BCl3 MFC set to  0.000000
9/13/2012	4:04:48 PM	PH3 MFC set to  0.000000
9/13/2012	4:04:48 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:04:48 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:04:48 PM	Tube furnace set to 0
9/13/2012	4:05:18 PM	H2 valve closed
9/13/2012	4:05:18 PM	BCl3 valve closed
9/13/2012	4:05:18 PM	PH3 valve closed
9/13/2012	4:05:18 PM	SiCl4 pre valve closed
9/13/2012	4:05:18 PM	SiCl4 post valve closed
9/13/2012	4:05:18 PM	Bypass valve closed
9/13/2012	4:05:18 PM	Bubbler valve closed
9/13/2012	4:05:18 PM	Helium valve opened
9/13/2012	4:05:18 PM	Main Vac valve opened
9/13/2012	4:05:18 PM	Helium MFC set to  20.000000
9/13/2012	4:05:18 PM	H2 MFC set to  0.000000
9/13/2012	4:05:18 PM	BCl3 MFC set to  0.000000
9/13/2012	4:05:18 PM	PH3 MFC set to  0.000000
9/13/2012	4:05:18 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:05:18 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:05:18 PM	Tube furnace set to 0
9/13/2012	4:05:48 PM	Helium valve closed
9/13/2012	4:05:48 PM	H2 valve closed
9/13/2012	4:05:48 PM	BCl3 valve closed
9/13/2012	4:05:48 PM	PH3 valve closed
9/13/2012	4:05:48 PM	SiCl4 pre valve closed
9/13/2012	4:05:48 PM	SiCl4 post valve closed
9/13/2012	4:05:48 PM	Bypass valve closed
9/13/2012	4:05:48 PM	Bubbler valve closed
9/13/2012	4:05:48 PM	Main Vac valve opened
9/13/2012	4:05:48 PM	Helium MFC set to  0.000000
9/13/2012	4:05:48 PM	H2 MFC set to  0.000000
9/13/2012	4:05:48 PM	BCl3 MFC set to  0.000000
9/13/2012	4:05:48 PM	PH3 MFC set to  0.000000
9/13/2012	4:05:48 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:05:48 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:05:49 PM	Tube furnace set to 0
9/13/2012	4:06:19 PM	H2 valve closed
9/13/2012	4:06:19 PM	BCl3 valve closed
9/13/2012	4:06:19 PM	PH3 valve closed
9/13/2012	4:06:19 PM	SiCl4 pre valve closed
9/13/2012	4:06:19 PM	SiCl4 post valve closed
9/13/2012	4:06:19 PM	Bypass valve closed
9/13/2012	4:06:19 PM	Bubbler valve closed
9/13/2012	4:06:19 PM	Helium valve opened
9/13/2012	4:06:19 PM	Main Vac valve opened
9/13/2012	4:06:19 PM	Helium MFC set to  20.000000
9/13/2012	4:06:19 PM	H2 MFC set to  0.000000
9/13/2012	4:06:19 PM	BCl3 MFC set to  0.000000
9/13/2012	4:06:19 PM	PH3 MFC set to  0.000000
9/13/2012	4:06:19 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:06:19 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:06:19 PM	Tube furnace set to 0
9/13/2012	4:06:49 PM	Helium valve closed
9/13/2012	4:06:49 PM	H2 valve closed
9/13/2012	4:06:49 PM	BCl3 valve closed
9/13/2012	4:06:49 PM	PH3 valve closed
9/13/2012	4:06:49 PM	SiCl4 pre valve closed
9/13/2012	4:06:49 PM	SiCl4 post valve closed
9/13/2012	4:06:49 PM	Bypass valve closed
9/13/2012	4:06:49 PM	Bubbler valve closed
9/13/2012	4:06:49 PM	Main Vac valve opened
9/13/2012	4:06:49 PM	Helium MFC set to  0.000000
9/13/2012	4:06:49 PM	H2 MFC set to  0.000000
9/13/2012	4:06:49 PM	BCl3 MFC set to  0.000000
9/13/2012	4:06:49 PM	PH3 MFC set to  0.000000
9/13/2012	4:06:49 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:06:49 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:06:49 PM	Tube furnace set to 0
9/13/2012	4:07:19 PM	H2 valve closed
9/13/2012	4:07:19 PM	BCl3 valve closed
9/13/2012	4:07:19 PM	PH3 valve closed
9/13/2012	4:07:19 PM	SiCl4 pre valve closed
9/13/2012	4:07:19 PM	SiCl4 post valve closed
9/13/2012	4:07:19 PM	Bypass valve closed
9/13/2012	4:07:19 PM	Bubbler valve closed
9/13/2012	4:07:19 PM	Helium valve opened
9/13/2012	4:07:19 PM	Main Vac valve opened
9/13/2012	4:07:19 PM	Helium MFC set to  20.000000
9/13/2012	4:07:19 PM	H2 MFC set to  0.000000
9/13/2012	4:07:19 PM	BCl3 MFC set to  0.000000
9/13/2012	4:07:19 PM	PH3 MFC set to  0.000000
9/13/2012	4:07:19 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:07:19 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:07:19 PM	Tube furnace set to 0
9/13/2012	4:07:49 PM	Helium valve closed
9/13/2012	4:07:49 PM	H2 valve closed
9/13/2012	4:07:49 PM	BCl3 valve closed
9/13/2012	4:07:49 PM	PH3 valve closed
9/13/2012	4:07:49 PM	SiCl4 pre valve closed
9/13/2012	4:07:49 PM	SiCl4 post valve closed
9/13/2012	4:07:49 PM	Bypass valve closed
9/13/2012	4:07:49 PM	Bubbler valve closed
9/13/2012	4:07:49 PM	Main Vac valve opened
9/13/2012	4:07:49 PM	Helium MFC set to  0.000000
9/13/2012	4:07:49 PM	H2 MFC set to  0.000000
9/13/2012	4:07:49 PM	BCl3 MFC set to  0.000000
9/13/2012	4:07:49 PM	PH3 MFC set to  0.000000
9/13/2012	4:07:49 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:07:49 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:07:50 PM	Tube furnace set to 0
9/13/2012	4:08:20 PM	H2 valve closed
9/13/2012	4:08:20 PM	BCl3 valve closed
9/13/2012	4:08:20 PM	PH3 valve closed
9/13/2012	4:08:20 PM	SiCl4 pre valve closed
9/13/2012	4:08:20 PM	SiCl4 post valve closed
9/13/2012	4:08:20 PM	Bypass valve closed
9/13/2012	4:08:20 PM	Bubbler valve closed
9/13/2012	4:08:20 PM	Helium valve opened
9/13/2012	4:08:20 PM	Main Vac valve opened
9/13/2012	4:08:20 PM	Helium MFC set to  20.000000
9/13/2012	4:08:20 PM	H2 MFC set to  0.000000
9/13/2012	4:08:20 PM	BCl3 MFC set to  0.000000
9/13/2012	4:08:20 PM	PH3 MFC set to  0.000000
9/13/2012	4:08:20 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:08:20 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:08:20 PM	Tube furnace set to 0
9/13/2012	4:08:50 PM	Helium valve closed
9/13/2012	4:08:50 PM	H2 valve closed
9/13/2012	4:08:50 PM	BCl3 valve closed
9/13/2012	4:08:50 PM	PH3 valve closed
9/13/2012	4:08:50 PM	SiCl4 pre valve closed
9/13/2012	4:08:50 PM	SiCl4 post valve closed
9/13/2012	4:08:50 PM	Bypass valve closed
9/13/2012	4:08:50 PM	Bubbler valve closed
9/13/2012	4:08:50 PM	Main Vac valve opened
9/13/2012	4:08:50 PM	Helium MFC set to  0.000000
9/13/2012	4:08:50 PM	H2 MFC set to  0.000000
9/13/2012	4:08:50 PM	BCl3 MFC set to  0.000000
9/13/2012	4:08:50 PM	PH3 MFC set to  0.000000
9/13/2012	4:08:50 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:08:50 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:08:50 PM	Tube furnace set to 0
9/13/2012	4:09:20 PM	H2 valve closed
9/13/2012	4:09:20 PM	BCl3 valve closed
9/13/2012	4:09:20 PM	PH3 valve closed
9/13/2012	4:09:20 PM	SiCl4 pre valve closed
9/13/2012	4:09:20 PM	SiCl4 post valve closed
9/13/2012	4:09:20 PM	Bypass valve closed
9/13/2012	4:09:20 PM	Bubbler valve closed
9/13/2012	4:09:20 PM	Helium valve opened
9/13/2012	4:09:20 PM	Main Vac valve opened
9/13/2012	4:09:20 PM	Helium MFC set to  20.000000
9/13/2012	4:09:20 PM	H2 MFC set to  0.000000
9/13/2012	4:09:20 PM	BCl3 MFC set to  0.000000
9/13/2012	4:09:20 PM	PH3 MFC set to  0.000000
9/13/2012	4:09:20 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:09:20 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:09:20 PM	Tube furnace set to 0
9/13/2012	4:09:50 PM	Helium valve closed
9/13/2012	4:09:50 PM	H2 valve closed
9/13/2012	4:09:50 PM	BCl3 valve closed
9/13/2012	4:09:50 PM	PH3 valve closed
9/13/2012	4:09:50 PM	SiCl4 pre valve closed
9/13/2012	4:09:50 PM	SiCl4 post valve closed
9/13/2012	4:09:50 PM	Bypass valve closed
9/13/2012	4:09:50 PM	Bubbler valve closed
9/13/2012	4:09:50 PM	Main Vac valve opened
9/13/2012	4:09:50 PM	Helium MFC set to  0.000000
9/13/2012	4:09:50 PM	H2 MFC set to  0.000000
9/13/2012	4:09:50 PM	BCl3 MFC set to  0.000000
9/13/2012	4:09:50 PM	PH3 MFC set to  0.000000
9/13/2012	4:09:50 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:09:50 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:09:51 PM	Tube furnace set to 0
9/13/2012	4:10:21 PM	H2 valve closed
9/13/2012	4:10:21 PM	BCl3 valve closed
9/13/2012	4:10:21 PM	PH3 valve closed
9/13/2012	4:10:21 PM	SiCl4 pre valve closed
9/13/2012	4:10:21 PM	SiCl4 post valve closed
9/13/2012	4:10:21 PM	Bypass valve closed
9/13/2012	4:10:21 PM	Bubbler valve closed
9/13/2012	4:10:21 PM	Helium valve opened
9/13/2012	4:10:21 PM	Main Vac valve opened
9/13/2012	4:10:21 PM	Helium MFC set to  20.000000
9/13/2012	4:10:21 PM	H2 MFC set to  0.000000
9/13/2012	4:10:21 PM	BCl3 MFC set to  0.000000
9/13/2012	4:10:21 PM	PH3 MFC set to  0.000000
9/13/2012	4:10:21 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:10:21 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:10:21 PM	Tube furnace set to 0
9/13/2012	4:10:51 PM	Helium valve closed
9/13/2012	4:10:51 PM	H2 valve closed
9/13/2012	4:10:51 PM	BCl3 valve closed
9/13/2012	4:10:51 PM	PH3 valve closed
9/13/2012	4:10:51 PM	SiCl4 pre valve closed
9/13/2012	4:10:51 PM	SiCl4 post valve closed
9/13/2012	4:10:51 PM	Bypass valve closed
9/13/2012	4:10:51 PM	Bubbler valve closed
9/13/2012	4:10:51 PM	Main Vac valve opened
9/13/2012	4:10:51 PM	Helium MFC set to  0.000000
9/13/2012	4:10:51 PM	H2 MFC set to  0.000000
9/13/2012	4:10:51 PM	BCl3 MFC set to  0.000000
9/13/2012	4:10:51 PM	PH3 MFC set to  0.000000
9/13/2012	4:10:51 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:10:51 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:10:51 PM	Tube furnace set to 0
9/13/2012	4:11:21 PM	H2 valve closed
9/13/2012	4:11:21 PM	BCl3 valve closed
9/13/2012	4:11:21 PM	PH3 valve closed
9/13/2012	4:11:21 PM	SiCl4 pre valve closed
9/13/2012	4:11:21 PM	SiCl4 post valve closed
9/13/2012	4:11:21 PM	Bypass valve closed
9/13/2012	4:11:21 PM	Bubbler valve closed
9/13/2012	4:11:21 PM	Helium valve opened
9/13/2012	4:11:21 PM	Main Vac valve opened
9/13/2012	4:11:21 PM	Helium MFC set to  20.000000
9/13/2012	4:11:21 PM	H2 MFC set to  0.000000
9/13/2012	4:11:21 PM	BCl3 MFC set to  0.000000
9/13/2012	4:11:21 PM	PH3 MFC set to  0.000000
9/13/2012	4:11:21 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:11:21 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:11:21 PM	Tube furnace set to 0
9/13/2012	4:11:51 PM	Helium valve closed
9/13/2012	4:11:51 PM	H2 valve closed
9/13/2012	4:11:51 PM	BCl3 valve closed
9/13/2012	4:11:51 PM	PH3 valve closed
9/13/2012	4:11:51 PM	SiCl4 pre valve closed
9/13/2012	4:11:51 PM	SiCl4 post valve closed
9/13/2012	4:11:51 PM	Bypass valve closed
9/13/2012	4:11:51 PM	Bubbler valve closed
9/13/2012	4:11:51 PM	Main Vac valve opened
9/13/2012	4:11:51 PM	Helium MFC set to  0.000000
9/13/2012	4:11:51 PM	H2 MFC set to  0.000000
9/13/2012	4:11:51 PM	BCl3 MFC set to  0.000000
9/13/2012	4:11:51 PM	PH3 MFC set to  0.000000
9/13/2012	4:11:51 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:11:51 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:11:51 PM	Tube furnace set to 0
9/13/2012	4:12:21 PM	H2 valve closed
9/13/2012	4:12:22 PM	BCl3 valve closed
9/13/2012	4:12:22 PM	PH3 valve closed
9/13/2012	4:12:22 PM	SiCl4 pre valve closed
9/13/2012	4:12:22 PM	SiCl4 post valve closed
9/13/2012	4:12:22 PM	Bypass valve closed
9/13/2012	4:12:22 PM	Bubbler valve closed
9/13/2012	4:12:22 PM	Helium valve opened
9/13/2012	4:12:22 PM	Main Vac valve opened
9/13/2012	4:12:22 PM	Helium MFC set to  20.000000
9/13/2012	4:12:22 PM	H2 MFC set to  0.000000
9/13/2012	4:12:22 PM	BCl3 MFC set to  0.000000
9/13/2012	4:12:22 PM	PH3 MFC set to  0.000000
9/13/2012	4:12:22 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:12:22 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:12:22 PM	Tube furnace set to 0
9/13/2012	4:12:52 PM	Helium valve closed
9/13/2012	4:12:52 PM	H2 valve closed
9/13/2012	4:12:52 PM	BCl3 valve closed
9/13/2012	4:12:52 PM	PH3 valve closed
9/13/2012	4:12:52 PM	SiCl4 pre valve closed
9/13/2012	4:12:52 PM	SiCl4 post valve closed
9/13/2012	4:12:52 PM	Bypass valve closed
9/13/2012	4:12:52 PM	Bubbler valve closed
9/13/2012	4:12:52 PM	Main Vac valve opened
9/13/2012	4:12:52 PM	Helium MFC set to  0.000000
9/13/2012	4:12:52 PM	H2 MFC set to  0.000000
9/13/2012	4:12:52 PM	BCl3 MFC set to  0.000000
9/13/2012	4:12:52 PM	PH3 MFC set to  0.000000
9/13/2012	4:12:52 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:12:52 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:12:52 PM	Tube furnace set to 0
9/13/2012	4:13:22 PM	H2 valve closed
9/13/2012	4:13:22 PM	BCl3 valve closed
9/13/2012	4:13:22 PM	PH3 valve closed
9/13/2012	4:13:22 PM	SiCl4 pre valve closed
9/13/2012	4:13:22 PM	SiCl4 post valve closed
9/13/2012	4:13:22 PM	Bypass valve closed
9/13/2012	4:13:22 PM	Bubbler valve closed
9/13/2012	4:13:22 PM	Helium valve opened
9/13/2012	4:13:22 PM	Main Vac valve opened
9/13/2012	4:13:22 PM	Helium MFC set to  20.000000
9/13/2012	4:13:22 PM	H2 MFC set to  0.000000
9/13/2012	4:13:22 PM	BCl3 MFC set to  0.000000
9/13/2012	4:13:22 PM	PH3 MFC set to  0.000000
9/13/2012	4:13:22 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:13:22 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:13:22 PM	Tube furnace set to 0
9/13/2012	4:13:52 PM	Helium valve closed
9/13/2012	4:13:52 PM	H2 valve closed
9/13/2012	4:13:52 PM	BCl3 valve closed
9/13/2012	4:13:52 PM	PH3 valve closed
9/13/2012	4:13:52 PM	SiCl4 pre valve closed
9/13/2012	4:13:52 PM	SiCl4 post valve closed
9/13/2012	4:13:52 PM	Bypass valve closed
9/13/2012	4:13:52 PM	Bubbler valve closed
9/13/2012	4:13:52 PM	Main Vac valve opened
9/13/2012	4:13:52 PM	Helium MFC set to  0.000000
9/13/2012	4:13:52 PM	H2 MFC set to  0.000000
9/13/2012	4:13:52 PM	BCl3 MFC set to  0.000000
9/13/2012	4:13:52 PM	PH3 MFC set to  0.000000
9/13/2012	4:13:52 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:13:52 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:13:52 PM	Tube furnace set to 0
9/13/2012	4:13:53 PM	Run finished at 4:13 PM
9/13/2012	4:13:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/13/2012	4:15:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/13/2012	4:15:45 PM	Recipe started at 4:15 PM
9/13/2012	4:15:45 PM	Helium valve closed
9/13/2012	4:15:45 PM	H2 valve closed
9/13/2012	4:15:45 PM	BCl3 valve closed
9/13/2012	4:15:45 PM	PH3 valve closed
9/13/2012	4:15:45 PM	SiCl4 pre valve closed
9/13/2012	4:15:45 PM	SiCl4 post valve closed
9/13/2012	4:15:45 PM	Main Vac valve closed
9/13/2012	4:15:45 PM	Bubbler valve closed
9/13/2012	4:15:45 PM	Bypass valve opened
9/13/2012	4:15:45 PM	Helium MFC set to  0.000000
9/13/2012	4:15:45 PM	H2 MFC set to  0.000000
9/13/2012	4:15:45 PM	BCl3 MFC set to  0.000000
9/13/2012	4:15:45 PM	PH3 MFC set to  0.000000
9/13/2012	4:15:45 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:15:45 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:15:46 PM	Tube furnace set to 0
9/13/2012	4:15:46 PM	Helium valve closed
9/13/2012	4:15:46 PM	H2 valve closed
9/13/2012	4:15:46 PM	BCl3 valve closed
9/13/2012	4:15:46 PM	PH3 valve closed
9/13/2012	4:15:46 PM	SiCl4 pre valve closed
9/13/2012	4:15:46 PM	SiCl4 post valve closed
9/13/2012	4:15:46 PM	Main Vac valve closed
9/13/2012	4:15:46 PM	Bubbler valve closed
9/13/2012	4:15:46 PM	Bypass valve opened
9/13/2012	4:15:46 PM	Helium MFC set to  0.000000
9/13/2012	4:15:46 PM	H2 MFC set to  0.000000
9/13/2012	4:15:46 PM	BCl3 MFC set to  0.000000
9/13/2012	4:15:46 PM	PH3 MFC set to  0.000000
9/13/2012	4:15:46 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:15:46 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:15:46 PM	Tube furnace set to 0
9/13/2012	4:15:47 PM	Helium valve closed
9/13/2012	4:15:47 PM	H2 valve closed
9/13/2012	4:15:47 PM	BCl3 valve closed
9/13/2012	4:15:47 PM	PH3 valve closed
9/13/2012	4:15:47 PM	SiCl4 pre valve closed
9/13/2012	4:15:47 PM	SiCl4 post valve closed
9/13/2012	4:15:47 PM	Bypass valve closed
9/13/2012	4:15:47 PM	Bubbler valve closed
9/13/2012	4:15:47 PM	Main Vac valve opened
9/13/2012	4:15:47 PM	Helium MFC set to  0.000000
9/13/2012	4:15:47 PM	H2 MFC set to  0.000000
9/13/2012	4:15:47 PM	BCl3 MFC set to  0.000000
9/13/2012	4:15:47 PM	PH3 MFC set to  0.000000
9/13/2012	4:15:47 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:15:47 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:15:47 PM	Tube furnace set to 0
9/13/2012	4:15:49 PM	H2 valve closed
9/13/2012	4:15:49 PM	BCl3 valve closed
9/13/2012	4:15:49 PM	PH3 valve closed
9/13/2012	4:15:49 PM	SiCl4 pre valve closed
9/13/2012	4:15:49 PM	SiCl4 post valve closed
9/13/2012	4:15:49 PM	Bypass valve closed
9/13/2012	4:15:49 PM	Bubbler valve closed
9/13/2012	4:15:49 PM	Helium valve opened
9/13/2012	4:15:49 PM	Main Vac valve opened
9/13/2012	4:15:49 PM	Helium MFC set to  20.000000
9/13/2012	4:15:49 PM	H2 MFC set to  0.000000
9/13/2012	4:15:49 PM	BCl3 MFC set to  0.000000
9/13/2012	4:15:49 PM	PH3 MFC set to  0.000000
9/13/2012	4:15:49 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:15:49 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:15:49 PM	Tube furnace set to 0
9/13/2012	4:16:19 PM	Helium valve closed
9/13/2012	4:16:19 PM	H2 valve closed
9/13/2012	4:16:19 PM	BCl3 valve closed
9/13/2012	4:16:19 PM	PH3 valve closed
9/13/2012	4:16:19 PM	SiCl4 pre valve closed
9/13/2012	4:16:19 PM	SiCl4 post valve closed
9/13/2012	4:16:19 PM	Bypass valve closed
9/13/2012	4:16:19 PM	Bubbler valve closed
9/13/2012	4:16:19 PM	Main Vac valve opened
9/13/2012	4:16:19 PM	Helium MFC set to  0.000000
9/13/2012	4:16:19 PM	H2 MFC set to  0.000000
9/13/2012	4:16:19 PM	BCl3 MFC set to  0.000000
9/13/2012	4:16:19 PM	PH3 MFC set to  0.000000
9/13/2012	4:16:19 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:16:19 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:16:19 PM	Tube furnace set to 0
9/13/2012	4:16:49 PM	H2 valve closed
9/13/2012	4:16:49 PM	BCl3 valve closed
9/13/2012	4:16:49 PM	PH3 valve closed
9/13/2012	4:16:49 PM	SiCl4 pre valve closed
9/13/2012	4:16:49 PM	SiCl4 post valve closed
9/13/2012	4:16:49 PM	Bypass valve closed
9/13/2012	4:16:49 PM	Bubbler valve closed
9/13/2012	4:16:49 PM	Helium valve opened
9/13/2012	4:16:49 PM	Main Vac valve opened
9/13/2012	4:16:49 PM	Helium MFC set to  20.000000
9/13/2012	4:16:49 PM	H2 MFC set to  0.000000
9/13/2012	4:16:49 PM	BCl3 MFC set to  0.000000
9/13/2012	4:16:49 PM	PH3 MFC set to  0.000000
9/13/2012	4:16:49 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:16:49 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:16:49 PM	Tube furnace set to 0
9/13/2012	4:17:19 PM	Helium valve closed
9/13/2012	4:17:19 PM	H2 valve closed
9/13/2012	4:17:19 PM	BCl3 valve closed
9/13/2012	4:17:19 PM	PH3 valve closed
9/13/2012	4:17:19 PM	SiCl4 pre valve closed
9/13/2012	4:17:19 PM	SiCl4 post valve closed
9/13/2012	4:17:19 PM	Bypass valve closed
9/13/2012	4:17:19 PM	Bubbler valve closed
9/13/2012	4:17:19 PM	Main Vac valve opened
9/13/2012	4:17:19 PM	Helium MFC set to  0.000000
9/13/2012	4:17:19 PM	H2 MFC set to  0.000000
9/13/2012	4:17:19 PM	BCl3 MFC set to  0.000000
9/13/2012	4:17:19 PM	PH3 MFC set to  0.000000
9/13/2012	4:17:19 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:17:19 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:17:20 PM	Tube furnace set to 0
9/13/2012	4:17:50 PM	H2 valve closed
9/13/2012	4:17:50 PM	BCl3 valve closed
9/13/2012	4:17:50 PM	PH3 valve closed
9/13/2012	4:17:50 PM	SiCl4 pre valve closed
9/13/2012	4:17:50 PM	SiCl4 post valve closed
9/13/2012	4:17:50 PM	Bypass valve closed
9/13/2012	4:17:50 PM	Bubbler valve closed
9/13/2012	4:17:50 PM	Helium valve opened
9/13/2012	4:17:50 PM	Main Vac valve opened
9/13/2012	4:17:50 PM	Helium MFC set to  20.000000
9/13/2012	4:17:50 PM	H2 MFC set to  0.000000
9/13/2012	4:17:50 PM	BCl3 MFC set to  0.000000
9/13/2012	4:17:50 PM	PH3 MFC set to  0.000000
9/13/2012	4:17:50 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:17:50 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:17:50 PM	Tube furnace set to 0
9/13/2012	4:18:20 PM	Helium valve closed
9/13/2012	4:18:20 PM	H2 valve closed
9/13/2012	4:18:20 PM	BCl3 valve closed
9/13/2012	4:18:20 PM	PH3 valve closed
9/13/2012	4:18:20 PM	SiCl4 pre valve closed
9/13/2012	4:18:20 PM	SiCl4 post valve closed
9/13/2012	4:18:20 PM	Bypass valve closed
9/13/2012	4:18:20 PM	Bubbler valve closed
9/13/2012	4:18:20 PM	Main Vac valve opened
9/13/2012	4:18:20 PM	Helium MFC set to  0.000000
9/13/2012	4:18:20 PM	H2 MFC set to  0.000000
9/13/2012	4:18:20 PM	BCl3 MFC set to  0.000000
9/13/2012	4:18:20 PM	PH3 MFC set to  0.000000
9/13/2012	4:18:20 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:18:20 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:18:20 PM	Tube furnace set to 0
9/13/2012	4:18:50 PM	H2 valve closed
9/13/2012	4:18:50 PM	BCl3 valve closed
9/13/2012	4:18:50 PM	PH3 valve closed
9/13/2012	4:18:50 PM	SiCl4 pre valve closed
9/13/2012	4:18:50 PM	SiCl4 post valve closed
9/13/2012	4:18:50 PM	Bypass valve closed
9/13/2012	4:18:50 PM	Bubbler valve closed
9/13/2012	4:18:50 PM	Helium valve opened
9/13/2012	4:18:50 PM	Main Vac valve opened
9/13/2012	4:18:50 PM	Helium MFC set to  20.000000
9/13/2012	4:18:50 PM	H2 MFC set to  0.000000
9/13/2012	4:18:50 PM	BCl3 MFC set to  0.000000
9/13/2012	4:18:50 PM	PH3 MFC set to  0.000000
9/13/2012	4:18:50 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:18:50 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:18:50 PM	Tube furnace set to 0
9/13/2012	4:19:20 PM	Helium valve closed
9/13/2012	4:19:20 PM	H2 valve closed
9/13/2012	4:19:20 PM	BCl3 valve closed
9/13/2012	4:19:20 PM	PH3 valve closed
9/13/2012	4:19:20 PM	SiCl4 pre valve closed
9/13/2012	4:19:20 PM	SiCl4 post valve closed
9/13/2012	4:19:20 PM	Bypass valve closed
9/13/2012	4:19:20 PM	Bubbler valve closed
9/13/2012	4:19:20 PM	Main Vac valve opened
9/13/2012	4:19:20 PM	Helium MFC set to  0.000000
9/13/2012	4:19:20 PM	H2 MFC set to  0.000000
9/13/2012	4:19:20 PM	BCl3 MFC set to  0.000000
9/13/2012	4:19:20 PM	PH3 MFC set to  0.000000
9/13/2012	4:19:20 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:19:20 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:19:20 PM	Tube furnace set to 0
9/13/2012	4:19:50 PM	H2 valve closed
9/13/2012	4:19:50 PM	BCl3 valve closed
9/13/2012	4:19:50 PM	PH3 valve closed
9/13/2012	4:19:51 PM	SiCl4 pre valve closed
9/13/2012	4:19:51 PM	SiCl4 post valve closed
9/13/2012	4:19:51 PM	Bypass valve closed
9/13/2012	4:19:51 PM	Bubbler valve closed
9/13/2012	4:19:51 PM	Helium valve opened
9/13/2012	4:19:51 PM	Main Vac valve opened
9/13/2012	4:19:51 PM	Helium MFC set to  20.000000
9/13/2012	4:19:51 PM	H2 MFC set to  0.000000
9/13/2012	4:19:51 PM	BCl3 MFC set to  0.000000
9/13/2012	4:19:51 PM	PH3 MFC set to  0.000000
9/13/2012	4:19:51 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:19:51 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:19:51 PM	Tube furnace set to 0
9/13/2012	4:20:21 PM	Helium valve closed
9/13/2012	4:20:21 PM	H2 valve closed
9/13/2012	4:20:21 PM	BCl3 valve closed
9/13/2012	4:20:21 PM	PH3 valve closed
9/13/2012	4:20:21 PM	SiCl4 pre valve closed
9/13/2012	4:20:21 PM	SiCl4 post valve closed
9/13/2012	4:20:21 PM	Bypass valve closed
9/13/2012	4:20:21 PM	Bubbler valve closed
9/13/2012	4:20:21 PM	Main Vac valve opened
9/13/2012	4:20:21 PM	Helium MFC set to  0.000000
9/13/2012	4:20:21 PM	H2 MFC set to  0.000000
9/13/2012	4:20:21 PM	BCl3 MFC set to  0.000000
9/13/2012	4:20:21 PM	PH3 MFC set to  0.000000
9/13/2012	4:20:21 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:20:21 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:20:21 PM	Tube furnace set to 0
9/13/2012	4:20:51 PM	H2 valve closed
9/13/2012	4:20:51 PM	BCl3 valve closed
9/13/2012	4:20:51 PM	PH3 valve closed
9/13/2012	4:20:51 PM	SiCl4 pre valve closed
9/13/2012	4:20:51 PM	SiCl4 post valve closed
9/13/2012	4:20:51 PM	Bypass valve closed
9/13/2012	4:20:51 PM	Bubbler valve closed
9/13/2012	4:20:51 PM	Helium valve opened
9/13/2012	4:20:51 PM	Main Vac valve opened
9/13/2012	4:20:51 PM	Helium MFC set to  20.000000
9/13/2012	4:20:51 PM	H2 MFC set to  0.000000
9/13/2012	4:20:51 PM	BCl3 MFC set to  0.000000
9/13/2012	4:20:51 PM	PH3 MFC set to  0.000000
9/13/2012	4:20:51 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:20:51 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:20:51 PM	Tube furnace set to 0
9/13/2012	4:21:21 PM	Helium valve closed
9/13/2012	4:21:21 PM	H2 valve closed
9/13/2012	4:21:21 PM	BCl3 valve closed
9/13/2012	4:21:21 PM	PH3 valve closed
9/13/2012	4:21:21 PM	SiCl4 pre valve closed
9/13/2012	4:21:21 PM	SiCl4 post valve closed
9/13/2012	4:21:21 PM	Bypass valve closed
9/13/2012	4:21:21 PM	Bubbler valve closed
9/13/2012	4:21:21 PM	Main Vac valve opened
9/13/2012	4:21:21 PM	Helium MFC set to  0.000000
9/13/2012	4:21:21 PM	H2 MFC set to  0.000000
9/13/2012	4:21:21 PM	BCl3 MFC set to  0.000000
9/13/2012	4:21:21 PM	PH3 MFC set to  0.000000
9/13/2012	4:21:21 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:21:21 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:21:21 PM	Tube furnace set to 0
9/13/2012	4:21:51 PM	H2 valve closed
9/13/2012	4:21:51 PM	BCl3 valve closed
9/13/2012	4:21:51 PM	PH3 valve closed
9/13/2012	4:21:51 PM	SiCl4 pre valve closed
9/13/2012	4:21:51 PM	SiCl4 post valve closed
9/13/2012	4:21:51 PM	Bypass valve closed
9/13/2012	4:21:51 PM	Bubbler valve closed
9/13/2012	4:21:51 PM	Helium valve opened
9/13/2012	4:21:51 PM	Main Vac valve opened
9/13/2012	4:21:51 PM	Helium MFC set to  20.000000
9/13/2012	4:21:51 PM	H2 MFC set to  0.000000
9/13/2012	4:21:51 PM	BCl3 MFC set to  0.000000
9/13/2012	4:21:51 PM	PH3 MFC set to  0.000000
9/13/2012	4:21:51 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:21:51 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:21:52 PM	Tube furnace set to 0
9/13/2012	4:22:22 PM	Helium valve closed
9/13/2012	4:22:22 PM	H2 valve closed
9/13/2012	4:22:22 PM	BCl3 valve closed
9/13/2012	4:22:22 PM	PH3 valve closed
9/13/2012	4:22:22 PM	SiCl4 pre valve closed
9/13/2012	4:22:22 PM	SiCl4 post valve closed
9/13/2012	4:22:22 PM	Bypass valve closed
9/13/2012	4:22:22 PM	Bubbler valve closed
9/13/2012	4:22:22 PM	Main Vac valve opened
9/13/2012	4:22:22 PM	Helium MFC set to  0.000000
9/13/2012	4:22:22 PM	H2 MFC set to  0.000000
9/13/2012	4:22:22 PM	BCl3 MFC set to  0.000000
9/13/2012	4:22:22 PM	PH3 MFC set to  0.000000
9/13/2012	4:22:22 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:22:22 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:22:22 PM	Tube furnace set to 0
9/13/2012	4:22:52 PM	H2 valve closed
9/13/2012	4:22:52 PM	BCl3 valve closed
9/13/2012	4:22:52 PM	PH3 valve closed
9/13/2012	4:22:52 PM	SiCl4 pre valve closed
9/13/2012	4:22:52 PM	SiCl4 post valve closed
9/13/2012	4:22:52 PM	Bypass valve closed
9/13/2012	4:22:52 PM	Bubbler valve closed
9/13/2012	4:22:52 PM	Helium valve opened
9/13/2012	4:22:52 PM	Main Vac valve opened
9/13/2012	4:22:52 PM	Helium MFC set to  20.000000
9/13/2012	4:22:52 PM	H2 MFC set to  0.000000
9/13/2012	4:22:52 PM	BCl3 MFC set to  0.000000
9/13/2012	4:22:52 PM	PH3 MFC set to  0.000000
9/13/2012	4:22:52 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:22:52 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:22:52 PM	Tube furnace set to 0
9/13/2012	4:23:22 PM	Helium valve closed
9/13/2012	4:23:22 PM	H2 valve closed
9/13/2012	4:23:22 PM	BCl3 valve closed
9/13/2012	4:23:22 PM	PH3 valve closed
9/13/2012	4:23:22 PM	SiCl4 pre valve closed
9/13/2012	4:23:22 PM	SiCl4 post valve closed
9/13/2012	4:23:22 PM	Bypass valve closed
9/13/2012	4:23:22 PM	Bubbler valve closed
9/13/2012	4:23:22 PM	Main Vac valve opened
9/13/2012	4:23:22 PM	Helium MFC set to  0.000000
9/13/2012	4:23:22 PM	H2 MFC set to  0.000000
9/13/2012	4:23:22 PM	BCl3 MFC set to  0.000000
9/13/2012	4:23:22 PM	PH3 MFC set to  0.000000
9/13/2012	4:23:22 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:23:22 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:23:22 PM	Tube furnace set to 0
9/13/2012	4:23:52 PM	H2 valve closed
9/13/2012	4:23:52 PM	BCl3 valve closed
9/13/2012	4:23:52 PM	PH3 valve closed
9/13/2012	4:23:52 PM	SiCl4 pre valve closed
9/13/2012	4:23:52 PM	SiCl4 post valve closed
9/13/2012	4:23:52 PM	Bypass valve closed
9/13/2012	4:23:52 PM	Bubbler valve closed
9/13/2012	4:23:52 PM	Helium valve opened
9/13/2012	4:23:52 PM	Main Vac valve opened
9/13/2012	4:23:52 PM	Helium MFC set to  20.000000
9/13/2012	4:23:52 PM	H2 MFC set to  0.000000
9/13/2012	4:23:52 PM	BCl3 MFC set to  0.000000
9/13/2012	4:23:52 PM	PH3 MFC set to  0.000000
9/13/2012	4:23:52 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:23:52 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:23:53 PM	Tube furnace set to 0
9/13/2012	4:24:23 PM	Helium valve closed
9/13/2012	4:24:23 PM	H2 valve closed
9/13/2012	4:24:23 PM	BCl3 valve closed
9/13/2012	4:24:23 PM	PH3 valve closed
9/13/2012	4:24:23 PM	SiCl4 pre valve closed
9/13/2012	4:24:23 PM	SiCl4 post valve closed
9/13/2012	4:24:23 PM	Bypass valve closed
9/13/2012	4:24:23 PM	Bubbler valve closed
9/13/2012	4:24:23 PM	Main Vac valve opened
9/13/2012	4:24:23 PM	Helium MFC set to  0.000000
9/13/2012	4:24:23 PM	H2 MFC set to  0.000000
9/13/2012	4:24:23 PM	BCl3 MFC set to  0.000000
9/13/2012	4:24:23 PM	PH3 MFC set to  0.000000
9/13/2012	4:24:23 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:24:23 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:24:23 PM	Tube furnace set to 0
9/13/2012	4:24:53 PM	H2 valve closed
9/13/2012	4:24:53 PM	BCl3 valve closed
9/13/2012	4:24:53 PM	PH3 valve closed
9/13/2012	4:24:53 PM	SiCl4 pre valve closed
9/13/2012	4:24:53 PM	SiCl4 post valve closed
9/13/2012	4:24:53 PM	Bypass valve closed
9/13/2012	4:24:53 PM	Bubbler valve closed
9/13/2012	4:24:53 PM	Helium valve opened
9/13/2012	4:24:53 PM	Main Vac valve opened
9/13/2012	4:24:53 PM	Helium MFC set to  20.000000
9/13/2012	4:24:53 PM	H2 MFC set to  0.000000
9/13/2012	4:24:53 PM	BCl3 MFC set to  0.000000
9/13/2012	4:24:53 PM	PH3 MFC set to  0.000000
9/13/2012	4:24:53 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:24:53 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:24:53 PM	Tube furnace set to 0
9/13/2012	4:25:23 PM	Helium valve closed
9/13/2012	4:25:23 PM	H2 valve closed
9/13/2012	4:25:23 PM	BCl3 valve closed
9/13/2012	4:25:23 PM	PH3 valve closed
9/13/2012	4:25:23 PM	SiCl4 pre valve closed
9/13/2012	4:25:23 PM	SiCl4 post valve closed
9/13/2012	4:25:23 PM	Bypass valve closed
9/13/2012	4:25:23 PM	Bubbler valve closed
9/13/2012	4:25:23 PM	Main Vac valve opened
9/13/2012	4:25:23 PM	Helium MFC set to  0.000000
9/13/2012	4:25:23 PM	H2 MFC set to  0.000000
9/13/2012	4:25:23 PM	BCl3 MFC set to  0.000000
9/13/2012	4:25:23 PM	PH3 MFC set to  0.000000
9/13/2012	4:25:23 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:25:23 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:25:23 PM	Tube furnace set to 0
9/13/2012	4:25:24 PM	Run finished at 4:25 PM
9/13/2012	4:25:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/13/2012	4:28:39 PM	Recipe started at 4:28 PM
9/13/2012	4:28:39 PM	Helium valve closed
9/13/2012	4:28:39 PM	H2 valve closed
9/13/2012	4:28:39 PM	BCl3 valve closed
9/13/2012	4:28:39 PM	PH3 valve closed
9/13/2012	4:28:39 PM	SiCl4 pre valve closed
9/13/2012	4:28:39 PM	SiCl4 post valve closed
9/13/2012	4:28:39 PM	Main Vac valve closed
9/13/2012	4:28:39 PM	Bypass valve closed
9/13/2012	4:28:39 PM	Bubbler valve closed
9/13/2012	4:28:39 PM	Helium MFC set to  0.000000
9/13/2012	4:28:39 PM	H2 MFC set to  0.000000
9/13/2012	4:28:39 PM	BCl3 MFC set to  0.000000
9/13/2012	4:28:39 PM	PH3 MFC set to  0.000000
9/13/2012	4:28:39 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:28:39 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:28:39 PM	Tube furnace set to 0
9/13/2012	4:28:42 PM	Helium valve closed
9/13/2012	4:28:42 PM	BCl3 valve closed
9/13/2012	4:28:42 PM	PH3 valve closed
9/13/2012	4:28:42 PM	SiCl4 pre valve closed
9/13/2012	4:28:42 PM	SiCl4 post valve closed
9/13/2012	4:28:42 PM	Main Vac valve closed
9/13/2012	4:28:42 PM	Bypass valve closed
9/13/2012	4:28:42 PM	Bubbler valve closed
9/13/2012	4:28:42 PM	H2 valve opened
9/13/2012	4:28:42 PM	Helium MFC set to  0.000000
9/13/2012	4:28:42 PM	H2 MFC set to  500.000000
9/13/2012	4:28:42 PM	BCl3 MFC set to  0.000000
9/13/2012	4:28:42 PM	PH3 MFC set to  0.000000
9/13/2012	4:28:43 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:28:43 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:28:43 PM	Tube furnace set to 0
9/13/2012	4:29:59 PM	Helium valve closed
9/13/2012	4:29:59 PM	BCl3 valve closed
9/13/2012	4:29:59 PM	PH3 valve closed
9/13/2012	4:29:59 PM	SiCl4 pre valve closed
9/13/2012	4:29:59 PM	SiCl4 post valve closed
9/13/2012	4:29:59 PM	Main Vac valve closed
9/13/2012	4:29:59 PM	Bypass valve closed
9/13/2012	4:29:59 PM	H2 valve opened
9/13/2012	4:29:59 PM	Bubbler valve opened
9/13/2012	4:29:59 PM	Helium MFC set to  0.000000
9/13/2012	4:29:59 PM	H2 MFC set to  500.000000
9/13/2012	4:29:59 PM	BCl3 MFC set to  0.000000
9/13/2012	4:29:59 PM	PH3 MFC set to  0.000000
9/13/2012	4:29:59 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:29:59 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:29:59 PM	Tube furnace set to 0
9/13/2012	4:30:00 PM	Helium valve closed
9/13/2012	4:30:00 PM	BCl3 valve closed
9/13/2012	4:30:00 PM	PH3 valve closed
9/13/2012	4:30:00 PM	SiCl4 pre valve closed
9/13/2012	4:30:00 PM	SiCl4 post valve closed
9/13/2012	4:30:00 PM	Main Vac valve closed
9/13/2012	4:30:00 PM	Bypass valve closed
9/13/2012	4:30:00 PM	H2 valve opened
9/13/2012	4:30:00 PM	Bubbler valve opened
9/13/2012	4:30:00 PM	Helium MFC set to  0.000000
9/13/2012	4:30:00 PM	H2 MFC set to  500.000000
9/13/2012	4:30:00 PM	BCl3 MFC set to  0.000000
9/13/2012	4:30:00 PM	PH3 MFC set to  0.000000
9/13/2012	4:30:00 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:30:00 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:30:01 PM	Tube furnace set to 1000
9/13/2012	4:50:01 PM	Helium valve closed
9/13/2012	4:50:01 PM	PH3 valve closed
9/13/2012	4:50:01 PM	Main Vac valve closed
9/13/2012	4:50:01 PM	Bypass valve closed
9/13/2012	4:50:01 PM	H2 valve opened
9/13/2012	4:50:01 PM	BCl3 valve opened
9/13/2012	4:50:01 PM	SiCl4 pre valve opened
9/13/2012	4:50:01 PM	SiCl4 post valve opened
9/13/2012	4:50:01 PM	Bubbler valve opened
9/13/2012	4:50:01 PM	Helium MFC set to  0.000000
9/13/2012	4:50:01 PM	H2 MFC set to  450.000000
9/13/2012	4:50:01 PM	BCl3 MFC set to  1.300000
9/13/2012	4:50:01 PM	PH3 MFC set to  0.000000
9/13/2012	4:50:01 PM	SiCl4 MFC set to  50.000000
9/13/2012	4:50:01 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:50:01 PM	Tube furnace set to 1000
9/13/2012	4:53:01 PM	Helium valve closed
9/13/2012	4:53:01 PM	BCl3 valve closed
9/13/2012	4:53:01 PM	PH3 valve closed
9/13/2012	4:53:01 PM	SiCl4 pre valve closed
9/13/2012	4:53:01 PM	SiCl4 post valve closed
9/13/2012	4:53:01 PM	Main Vac valve closed
9/13/2012	4:53:01 PM	Bypass valve closed
9/13/2012	4:53:01 PM	H2 valve opened
9/13/2012	4:53:01 PM	Bubbler valve opened
9/13/2012	4:53:01 PM	Helium MFC set to  0.000000
9/13/2012	4:53:01 PM	H2 MFC set to  500.000000
9/13/2012	4:53:01 PM	BCl3 MFC set to  0.000000
9/13/2012	4:53:01 PM	PH3 MFC set to  0.000000
9/13/2012	4:53:01 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:53:01 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:53:01 PM	Tube furnace set to 750
9/13/2012	4:58:01 PM	H2 valve closed
9/13/2012	4:58:01 PM	BCl3 valve closed
9/13/2012	4:58:01 PM	PH3 valve closed
9/13/2012	4:58:01 PM	SiCl4 pre valve closed
9/13/2012	4:58:01 PM	SiCl4 post valve closed
9/13/2012	4:58:01 PM	Main Vac valve closed
9/13/2012	4:58:01 PM	Bypass valve closed
9/13/2012	4:58:01 PM	Helium valve opened
9/13/2012	4:58:01 PM	Bubbler valve opened
9/13/2012	4:58:01 PM	Helium MFC set to  500.000000
9/13/2012	4:58:01 PM	H2 MFC set to  0.000000
9/13/2012	4:58:01 PM	BCl3 MFC set to  0.000000
9/13/2012	4:58:01 PM	PH3 MFC set to  0.000000
9/13/2012	4:58:01 PM	SiCl4 MFC set to  0.000000
9/13/2012	4:58:01 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	4:58:01 PM	Tube furnace set to 0
9/13/2012	5:08:13 PM	Run aborted at 5:08 PM
9/13/2012	5:08:13 PM	Helium valve closed
9/13/2012	5:08:13 PM	H2 valve closed
9/13/2012	5:08:13 PM	BCl3 valve closed
9/13/2012	5:08:13 PM	PH3 valve closed
9/13/2012	5:08:13 PM	SiCl4 pre valve closed
9/13/2012	5:08:13 PM	SiCl4 post valve closed
9/13/2012	5:08:13 PM	Bypass valve closed
9/13/2012	5:08:13 PM	Main Vac valve closed
9/13/2012	5:08:13 PM	Bubbler valve closed
9/13/2012	5:08:13 PM	Helium MFC set to  0.000000
9/13/2012	5:08:13 PM	H2 MFC set to  0.000000
9/13/2012	5:08:13 PM	BCl3 MFC set to  0.000000
9/13/2012	5:08:13 PM	PH3 MFC set to  0.000000
9/13/2012	5:08:13 PM	SiCl4 MFC set to  0.000000
9/13/2012	5:08:13 PM	Tube furnace set to 0
9/13/2012	5:08:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/13/2012	5:08:16 PM	Recipe started at 5:08 PM
9/13/2012	5:08:16 PM	Helium valve closed
9/13/2012	5:08:16 PM	H2 valve closed
9/13/2012	5:08:16 PM	BCl3 valve closed
9/13/2012	5:08:16 PM	PH3 valve closed
9/13/2012	5:08:16 PM	SiCl4 pre valve closed
9/13/2012	5:08:16 PM	SiCl4 post valve closed
9/13/2012	5:08:16 PM	Main Vac valve closed
9/13/2012	5:08:16 PM	Bypass valve closed
9/13/2012	5:08:16 PM	Bubbler valve closed
9/13/2012	5:08:16 PM	Helium MFC set to  0.000000
9/13/2012	5:08:16 PM	H2 MFC set to  0.000000
9/13/2012	5:08:16 PM	BCl3 MFC set to  0.000000
9/13/2012	5:08:16 PM	PH3 MFC set to  0.000000
9/13/2012	5:08:16 PM	SiCl4 MFC set to  0.000000
9/13/2012	5:08:16 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	5:08:16 PM	Tube furnace set to 0
9/13/2012	5:08:19 PM	H2 valve closed
9/13/2012	5:08:19 PM	BCl3 valve closed
9/13/2012	5:08:19 PM	PH3 valve closed
9/13/2012	5:08:19 PM	SiCl4 pre valve closed
9/13/2012	5:08:19 PM	SiCl4 post valve closed
9/13/2012	5:08:19 PM	Main Vac valve closed
9/13/2012	5:08:19 PM	Bypass valve closed
9/13/2012	5:08:19 PM	Bubbler valve closed
9/13/2012	5:08:19 PM	Helium valve opened
9/13/2012	5:08:19 PM	Helium MFC set to  500.000000
9/13/2012	5:08:19 PM	H2 MFC set to  0.000000
9/13/2012	5:08:19 PM	BCl3 MFC set to  0.000000
9/13/2012	5:08:19 PM	PH3 MFC set to  0.000000
9/13/2012	5:08:19 PM	SiCl4 MFC set to  0.000000
9/13/2012	5:08:19 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	5:08:19 PM	Tube furnace set to 0
9/13/2012	5:08:19 PM	Helium valve closed
9/13/2012	5:08:19 PM	H2 valve closed
9/13/2012	5:08:19 PM	BCl3 valve closed
9/13/2012	5:08:19 PM	PH3 valve closed
9/13/2012	5:08:19 PM	SiCl4 pre valve closed
9/13/2012	5:08:19 PM	SiCl4 post valve closed
9/13/2012	5:08:19 PM	Main Vac valve closed
9/13/2012	5:08:19 PM	Bypass valve closed
9/13/2012	5:08:19 PM	Bubbler valve closed
9/13/2012	5:08:19 PM	Helium MFC set to  0.000000
9/13/2012	5:08:19 PM	H2 MFC set to  0.000000
9/13/2012	5:08:19 PM	BCl3 MFC set to  0.000000
9/13/2012	5:08:19 PM	PH3 MFC set to  0.000000
9/13/2012	5:08:19 PM	SiCl4 MFC set to  0.000000
9/13/2012	5:08:19 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	5:08:20 PM	Tube furnace set to 0
9/13/2012	5:08:21 PM	Run finished at 5:08 PM
9/13/2012	5:08:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/13/2012	5:17:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/13/2012	5:17:42 PM	Recipe started at 5:17 PM
9/13/2012	5:17:42 PM	Helium valve closed
9/13/2012	5:17:42 PM	H2 valve closed
9/13/2012	5:17:42 PM	BCl3 valve closed
9/13/2012	5:17:42 PM	PH3 valve closed
9/13/2012	5:17:42 PM	SiCl4 pre valve closed
9/13/2012	5:17:42 PM	SiCl4 post valve closed
9/13/2012	5:17:42 PM	Main Vac valve closed
9/13/2012	5:17:42 PM	Bubbler valve closed
9/13/2012	5:17:42 PM	Bypass valve opened
9/13/2012	5:17:42 PM	Helium MFC set to  0.000000
9/13/2012	5:17:42 PM	H2 MFC set to  0.000000
9/13/2012	5:17:42 PM	BCl3 MFC set to  0.000000
9/13/2012	5:17:42 PM	PH3 MFC set to  0.000000
9/13/2012	5:17:42 PM	SiCl4 MFC set to  0.000000
9/13/2012	5:17:42 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	5:17:42 PM	Tube furnace set to 0
9/13/2012	5:19:08 PM	Helium valve closed
9/13/2012	5:19:08 PM	H2 valve closed
9/13/2012	5:19:08 PM	BCl3 valve closed
9/13/2012	5:19:08 PM	PH3 valve closed
9/13/2012	5:19:08 PM	SiCl4 pre valve closed
9/13/2012	5:19:08 PM	SiCl4 post valve closed
9/13/2012	5:19:08 PM	Main Vac valve closed
9/13/2012	5:19:08 PM	Bubbler valve closed
9/13/2012	5:19:08 PM	Bypass valve opened
9/13/2012	5:19:08 PM	Helium MFC set to  0.000000
9/13/2012	5:19:08 PM	H2 MFC set to  0.000000
9/13/2012	5:19:08 PM	BCl3 MFC set to  0.000000
9/13/2012	5:19:08 PM	PH3 MFC set to  0.000000
9/13/2012	5:19:08 PM	SiCl4 MFC set to  0.000000
9/13/2012	5:19:08 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	5:19:08 PM	Tube furnace set to 0
9/13/2012	5:20:08 PM	Helium valve closed
9/13/2012	5:20:08 PM	H2 valve closed
9/13/2012	5:20:08 PM	BCl3 valve closed
9/13/2012	5:20:09 PM	PH3 valve closed
9/13/2012	5:20:09 PM	SiCl4 pre valve closed
9/13/2012	5:20:09 PM	SiCl4 post valve closed
9/13/2012	5:20:09 PM	Bypass valve closed
9/13/2012	5:20:09 PM	Bubbler valve closed
9/13/2012	5:20:09 PM	Main Vac valve opened
9/13/2012	5:20:09 PM	Helium MFC set to  0.000000
9/13/2012	5:20:09 PM	H2 MFC set to  0.000000
9/13/2012	5:20:09 PM	BCl3 MFC set to  0.000000
9/13/2012	5:20:09 PM	PH3 MFC set to  0.000000
9/13/2012	5:20:09 PM	SiCl4 MFC set to  0.000000
9/13/2012	5:20:09 PM	Bypass solenoid MFC set to  0.000000
9/13/2012	5:20:09 PM	Tube furnace set to 0
9/13/2012	5:20:10 PM	Run finished at 5:20 PM
9/13/2012	5:20:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
